Hot pressing, a common method to produce special composition sputter targets

Hot-pressing sintering is a process of applying pressure in the mold to the powder that is difficult to sinter, and at the same time raising the temperature for sintering. Fill the raw material powder into the metal or high-strength graphite mold cavity, press to the normal sintering temperature or slightly lower while pressing, the powder is sintered into a dense, uniform, fine-grained ceramic material in a short time. The mold materials for hot press sintering include graphite, copper oxide, silicon carbide, etc., among which graphite materials have been widely used. The hot pressing sintering process can be divided into constant pressure method, high-temperature pressure method, and segmented pressure method according to different pressure methods. According to the sintering method, it can be divided into vacuum sintering, atmosphere sintering, continuous pressure sintering, etc. Compared with other sintering methods, the hot-pressing sintering process has the following advantages: the hot-pressing sintering process is carried out at the same time by heating and pressing, and the powder is in a thermoplastic state, which facilitates the contact diffusion and flow of the particles and facilitates the mass transfer process, thus forming The pressure is small; it can also reduce the sintering temperature and shorten the sintering time to resist the growth of grains to obtain products with fine grains, higher density, and higher mechanical properties and higher mechanical properties, without adding sintering aids Or molding aids can produce ultra-high purity ceramic sputtering target products. The hot-pressing sintering method can also be used to produce alloys with large melting point differences and serious segregation. Customized alloy materials can be produced by powder metallurgy. QS Advanced Materials has produced more than 200 sputtering targets with different materials using a mature hot pressing process. Including alloys, oxides, nitride, selenide, telluride, etc.